发明名称 |
Columnar structured material and method of manufacturing the same |
摘要 |
A method of manufacturing a dot pattern includes the steps of preparing a structured material composed of a plurality of columnar members containing a first component and a region containing a second component different from the first component surrounding the columnar members, with the structured material being formed by depositing the first component and the second component on a substrate, and removing the columnar members from the structured material to form a porous material having a columnar hole. Additional steps include introducing a mask material into the columnar hole of the porous material to form a dot pattern, and removing the porous material.
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申请公布号 |
US7387967(B2) |
申请公布日期 |
2008.06.17 |
申请号 |
US20050535452 |
申请日期 |
2005.05.19 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OGAWA MIKI;MIYATA HIROKATSU;OTTO ALBRECHT;KURIYAMA AKIRA;OKURA HIROSHI;DEN TOHRU;FUKUTANI KAZUHIKO |
分类号 |
B82B1/00;H01L21/461;C23C14/16;C23C14/58;H01L21/033;H01L21/302;H01L21/308;H01L21/3205;H01L29/06 |
主分类号 |
B82B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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