Semiconductor substrate for solid-state image pickup device and producing method therefor

摘要

A semiconductor substrate for forming a pixel area provided surfacially with a plurality of pixels for photoelectric conversion, the semiconductor substrate, including a polysilicon film of a thickness of 0.5-2.0, on a rear surface of the pixel area-bearing surface, and having an oxygen concentration of 1.3E18-1.5E18 atom/cm³ (old ASTM).