APPARATUS DRIVING LIFT PIN AND DEVICE HAVING IT FOR MANUFACTURING FPD

摘要

A lift pin driving device and an apparatus for manufacturing a flat display device using the same are provided to lift a substrate horizontally by accurately performing the lifting motion of lift pins. A substrate is loading on a loading member, and plural lift pins penetrate the loading member to lift the substrate. The lift pins are installed on a pin plate which is lifted by a driving unit. The driving unit has a driving motor and plural pulleys coupled to a power transmission and driven by the driving motor. Tension of the power transmission is adjusted by a tensioner(200). The tensioner has a tension roller(240) movable forward and rearward, a guide member guiding linear motion of the movable bracket, a movable bracket(230) supporting the tension roller, a stationary bracket(210) for the guide member, and a tension adjusting member moving the movable bracket.