Device for producing a plasma or radicals comprises a reaction tube positioned in the longitudinal direction of a waveguide in the region of a maximum magnetic and minimum electric field strength and a magnetron

摘要

Device for producing a plasma or radicals comprises a reaction tube (1) positioned in the longitudinal direction of a waveguide (2) in the region of a maximum magnetic and minimum electric field strength and a magnetron (3) connected to a unit (4) for supplying a pulsed voltage. The reaction tube conducts gas at a pressure of 50-500 Pa. Preferred Features: A valve (5) is arranged in a feed line (7) for the process gas and is controlled by the unit for supplying a pulsed voltage so that a reduced amount of process gas is fed into the reaction tube.