发明名称 BOARD CARRYING METHOD AND DEVICE THEREFOR
摘要 It is arranged that boards can be carried in and out of optional shelves in a board cassette. When it is desired to carry out a board (1G) stored in each shelf (1R) formed as a shelf plate by use of a plurality of wires (4) attached under tension to a cassette main body (1) constituting a board cassette (1C), this is achieved by moving board lifting arms (14) constituting a pair of board lifting units (1U1) onto a shelf (1R') immediately below the shelf (1R) having the board (1G) stored therein, actuating a pneumatic floating unit (21) attached to the upper surface of each board lifting arm (14), and spouting pressure air to extract the board (1G) in its floating state.
申请公布号 KR20070104664(A) 申请公布日期 2007.10.26
申请号 KR20077021237 申请日期 2007.09.14
申请人 SHINKO ELECTRIC CO., LTD. 发明人 KITAZAWA YASUYOSHI
分类号 H01L21/68;B65G49/06;H01L21/673;H01L21/677 主分类号 H01L21/68
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