发明名称 |
BOARD CARRYING METHOD AND DEVICE THEREFOR |
摘要 |
It is arranged that boards can be carried in and out of optional shelves in a board cassette. When it is desired to carry out a board (1G) stored in each shelf (1R) formed as a shelf plate by use of a plurality of wires (4) attached under tension to a cassette main body (1) constituting a board cassette (1C), this is achieved by moving board lifting arms (14) constituting a pair of board lifting units (1U1) onto a shelf (1R') immediately below the shelf (1R) having the board (1G) stored therein, actuating a pneumatic floating unit (21) attached to the upper surface of each board lifting arm (14), and spouting pressure air to extract the board (1G) in its floating state.
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申请公布号 |
KR20070104664(A) |
申请公布日期 |
2007.10.26 |
申请号 |
KR20077021237 |
申请日期 |
2007.09.14 |
申请人 |
SHINKO ELECTRIC CO., LTD. |
发明人 |
KITAZAWA YASUYOSHI |
分类号 |
H01L21/68;B65G49/06;H01L21/673;H01L21/677 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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