DRESSER FOR PAD-ATTACHED SURFACE OF SURFACE PLATE, AND PAD-ATTACHED SURFACE DRESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dresser for a pad-attached surface of an upper surface plate of a double-face polishing device capable of eliminating foreign matter such as fixed material and rust adhered to a pad-attached surface of the surface plate and capable of maintaining surface roughness of the pad-attached surface at the same time in good balance without changing flatness of the pad-attached surface.

SOLUTION: A hard and annular base material 11 provided with teeth 14 in the periphery thereof carries a soft abrasive particle layers 13A in the top surface thereof through a soft elastic member 12 such as a sponge body to form a dresser capable of dressing the pad-attached surface by partially deforming the elastic member 12 and the abrasive particle layer 13A following irregularity of the foreign matter adhered to the pad-attached surface.

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