| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor for small mass measuement (QCM sensor) for measuring a small mass, used mainly in a liquid phase and comprising a quartz sensor element enhanced in measuring reliability. SOLUTION: In the sensor for measuring the small mass, one side main face of the sensor element using a metal film on a surface of a quartz substrate, and using a quartz oscillator with a receptor layer formed on the metal film, is sealed, the one side main face of the sensor element is surrounded by a wall body, a sheet is bonded over an edge part of the wall to seal an exposed space on the one side main face, and the sheet bonded over the edge of the wall comprises polyvinyl chloride. The problem hereinbefore is solved by this manner. COPYRIGHT: (C)2007,JPO&INPIT
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