| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of performing a testing process of a plurality of semiconductor elements (for instance, 4 elements) with same performance as that when one element is tested to a plurality of semiconductor elements formed on a semiconductor substrate; and to provide a testing method thereof. SOLUTION: The probe card 100 has a configuration with a plurality (for instance, 4 elements) of testing units TU corresponding to the number of simultaneous electrical measurements and mounted independently to each other, of which one unit comprises a probe needle 13, arranged corresponding to semiconductor elements to be tested, a power supply conductive layer 52, connected to the probe needle 13, a ground conductive layer 51, and a signal wring layer 53. COPYRIGHT: (C)2007,JPO&INPIT
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