发明名称 |
Liquid dispensing system |
摘要 |
A control system employed for dispensing liquid to a process via a flow passage from a container including an outer container and an inner container. The inner container is made of a flexible material and occupied by the liquid so that pressurized fluid in a compression space between the outer container and the inner container forces liquid out of the inner container to the manufacturing process via the flow passage. A pressure sensor is positioned to sense pressure in the flow passage. A controller that is responsive to the pressure sensor controls flow of the liquid in the flow passage by controlling the pressure of the pressurized fluid in the compression space.
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申请公布号 |
US2007108225(A1) |
申请公布日期 |
2007.05.17 |
申请号 |
US20070653797 |
申请日期 |
2007.01.16 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
O'DOUGHERTY KEVIN T. |
分类号 |
G01F11/00;B67D7/02;B67D7/08;B67D7/36 |
主分类号 |
G01F11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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