| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure and a method for highly reliably attaching a thermocouple to a heater chip used for thermocompression. SOLUTION: In a structure for attaching a thermocouple for a heater chip 1 in a lateral side shape of a heater chip body 2, a slit 5 communicating one end 12 to an outer form 11 is included close to an operating section 8, a pair of wires 3, 4 constructed from different kinds of metals inserted from the side of one main body lateral side 16 to the side adjoining to another end 6 of the slit 5 are extended to the side of another main body lateral side 17, and at least a part of a joint 23 in the tip of the thermocouple constituted by mutually fusing protruding distal ends invades the inside of the intermediate part 13 of the slit 5 in a fused state and then is solidified. COPYRIGHT: (C)2007,JPO&INPIT
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