TILT MIRROR ELEMENT AND METHOD OF DRIVING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive tilt mirror element which drives a mirror part at a high speed and a large amplitude. SOLUTION: The tilt mirror element 1 is provided with: a mirror part 2 which switches the optical paths of a light beam by reflecting the light beam on a mirror face 2a; a supporting frame part 3 which is formed around the outer circumferential part of the mirror part 2; torsion hinge parts 4 which move and positionally support the mirror part 2 with respect to the supporting frame part 3; movable comb electrodes 5a and fixed comb electrodes 5b which are so provided to engage with the side wall parts of the mirror part 2 and the side wall parts of the supporting frame part 3 which face to the side wall parts of the mirror part 2, and swing the mirror part 2 by using the electrostatic force generated by applying an electric voltage; and a pair of flat plate fixed electrodes 8a and 8b which are provided at the positions which face the mirror face 2a and swing the mirror part 2 by using the electrostatic force generated on the mirror part 2 by applying an electric voltage. COPYRIGHT: (C)2007,JPO&INPIT