| 摘要 |
PROBLEM TO BE SOLVED: To provide a focused ion beam forming device in which downsizing is realized by integrating an accelerator and a focusing lens system and the reduction ratio of the total device is maximized by making the accelerating tube of the accelerator as a part of the focusing lens system to form a nano beam. SOLUTION: Since the accelerator is a folding type tandem accelerator, a 180°analysis electromagnet is arranged at a high voltage terminal part, and a slit having an energy analysis and diffusion restricting slit function is installed at the entrance part of the acceleration tube on high energy side, and once again the beam is accelerated by the accelerator having a single hole lens effect, and by focusing, an MeV region high energy ion nano beam is formed. COPYRIGHT: (C)2007,JPO&INPIT
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