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发明名称
APPARATUS FOR DEPOSITION BY USE OF PROPELLER-TYPE INJECTOR
摘要
申请公布号
KR20060084249(A)
申请公布日期
2006.07.24
申请号
KR20050005040
申请日期
2005.01.19
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, MYOUNG SOO;KIM, HAN KI;LEE, KYU SUNG
分类号
C23C14/12;C23C14/00
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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