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发明名称
LEVEL SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
摘要
申请公布号
KR20060074875(A)
申请公布日期
2006.07.03
申请号
KR20050129772
申请日期
2005.12.26
申请人
ASML NETHERLANDS B.V.
发明人
BRUINSMA ANASTASIUS JACOBUS ANICETUS;STAALS FRANK;VAN WIJK ROBERT JAN;NIHTIANOV STOYAN
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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