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发明名称
ELECTRO STATIC CHUCK OF SEMICONDUCTOR ETCH EQUIPMENT
摘要
申请公布号
KR20060074710(A)
申请公布日期
2006.07.03
申请号
KR20040113822
申请日期
2004.12.28
申请人
HYNIX SEMICONDUCTOR INC.
发明人
HAN, KY HYUN
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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