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发明名称
Method of manufacturing a capacitor in a semiconductor device
摘要
申请公布号
KR100580119(B1)
申请公布日期
2006.05.12
申请号
KR20000036046
申请日期
2000.06.28
申请人
发明人
分类号
H01L21/8242;H01L27/04;H01L21/02;H01L21/311;H01L21/768;H01L21/822
主分类号
H01L21/8242
代理机构
代理人
主权项
地址
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