| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-sensitivity humidity sensor having an excellent initial characteristic and fluctuation characteristic after left in high temperature and high humidity. SOLUTION: This humidity sensor uses a moisture sensitive element with a polyimide having at least four benzene rings on a diamine side as a moisture sensitive film. Preferably, the moisture sensitive element can be selected from a moisture sensitive element with a polyimide having at least four benzene rings and at least one sulfonyl group on the diamine side as the moisture sensitive film, a moisture sensitive element with a polyimide having at least four benzene rings and at least one polyfluoroalkyl group on the diamine side as the moisture sensitive film, and a moisture sensitive element with a polyimide obtained by terminating a polyamic acid that is a precursor of the polyimides by terminal acetylene and performing dehydration and ring closure to it, as the moisture sensitive film. COPYRIGHT: (C)2006,JPO&NCIPI
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