发明名称 Laser micromachining method
摘要 A laser micromachining method is disclosed wherein a workpiece is milled using an incident beam from a laser beam focused above the surface of the workpiece. The incident beam is guided by a plasma channel generated by the incident beam. The plasma channel, which has a relatively constant diameter over an extended distance, is generated by continual Kerr effect self-focusing balanced by ionization of air beam defocusing.
申请公布号 US2006099810(A1) 申请公布日期 2006.05.11
申请号 US20040985572 申请日期 2004.11.10
申请人 INTEL CORPORATION 发明人 VORONOV SERGEI L.;RUMER CHRISTOPHER L.
分类号 H01L21/302 主分类号 H01L21/302
代理机构 代理人
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