发明名称 Method for manufacturing a magnetic head using a multi-stage ion milling
摘要 A method for manufacturing a magnetic head for perpendicular magnetic recording is disclosed. The method comprising: a first step of depositing a non-magnetic film over and around the main magnetic pole, and subsequently polishing and planarizing the non-magnetic film, wherein the non-magnetic film is made of a non-magnetic material which exhibits a lower ion milling rate than that of a magnetic metal material which constitutes the main magnetic pole; a second step of etching the surface by means of ion milling at a first angle relative to a stacked direction of the magnetic head, to form a stepped portion in which the main magnetic pole is lower from the non-magnetic film around the main magnetic pole; and a third step of etching the stepped portion, by means of ion milling, at a second angle relative to the stacked direction, wherein the second angle is larger than the first angle.
申请公布号 US2006098339(A1) 申请公布日期 2006.05.11
申请号 US20050266350 申请日期 2005.11.04
申请人 SAE MAGNETICS (H.K.) LTD. 发明人 KOYAMA YOSHIHIKO;MATONO NAOTO;NOTSUKE YASUYUKI
分类号 G11B5/147 主分类号 G11B5/147
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