| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that accurate thickness cannot be measured because, in the conventional thickness sensor, a ball or the like is made to ride on a sample put on a base, lifting distance of the ball is measured to determine thickness, and the sample is deformed by riding-on of the ball on a soft member. <P>SOLUTION: A thickness sensor 1 comprises a light projecting part 2 for irradiating an optical beam including an infrared ray at a prescribed angle in a prescribed range of a thickness face of a sheet member 7, a light receiving part 3 for measuring a light amount of reflected light from the thickness face among light from the light projecting part, and a measuring part 4 for measuring the thickness of the sheet member 7 on the basis of a measurement instrument by the light receiving part. The thickness sensor solves the problem by enabling measurement of exact size without giving stress on an object to be measured. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
