| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a crosstalk along XY-directions to the utmost to enhance rectilinearity, and to precisely measure shape information and physical information of a sample. SOLUTION: This surface information measuring instrument 1 is provided with: a probe 2 having a probe needle 2a; a Z-actuator 4 for fixing the probe 2, and expanded and contracted along a Z-direction perpendicular to a sample surface B when a voltage is impressed; an impression means 5 for impressing the voltage to the Z-actuator 4; and a control means for controlling an operation of the impression means 5. The Z-actuator 4 has: a piezoelectric body 20 expanded and contracted along the Z-direction; and a plurality of split electrodes 22 respectively provided electrically independently in a condition divided three or more along at least a circumferential direction on an inner circumferential face or an outer circumferential face of the piezoelectric body 20, and for impressing the voltage to the piezoelectric body 20 within a range of a contact area to be expanded and contracted, and the control means controls the impression means 5 to impress the voltage at a predetermined ratio of voltage impression amount so as to make same an expansion and contraction amount of the each contact area of the piezoelectric body 20 contacting with the each split electrode 22. COPYRIGHT: (C)2006,JPO&NCIPI |
