| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection condition setting method which enables the selection of an optimum inspection condition when a flaw is detected by a Die to Die inspection system and a Ref comparative inspection system. SOLUTION: In a flaw inspection system 1, a Die to Die inspection means 31a of a tuning server 30 is constituted so as to compare the predetermined regions of image data with each other to calculate a first threshold value not detecting a dummy flaw from the image data on the basis of the comparison result. A threshold value setting means 31 detects a first threshold value becoming the minimum value from the first threshold value to select the image data corresponding to the first threshold value becoming the minimum value as reference image data. A Ref comparative inspection means 31b compares the selected reference image data with other image data to calculate a second threshold value not detecting a dummy flaw at every other image data on the basis of the comparison result. Then, the threshold setting part 31 sets inspection condition information, based on the second threshold value and the reference image data. COPYRIGHT: (C)2006,JPO&NCIPI
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