| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve element clamping device for a back pressure type seal valve to support a back side of a valve element pressed against a valve seat by a small power for a small operational time, and a load-lock type vacuum film deposition apparatus using the clamping device. SOLUTION: The back pressure type seal valve 17 is constituted in such a way that the back side of the valve element 17 is pressed from the inner side of a vacuum chamber 10 by a pressing means 18, the front side of the valve element 17 is consequently abutted on a peripheral edge of an opening 10b of an inner face 10a of a wall body of the vacuum chamber 10, and thus the opening 10b is sealed, wherein the back pressure type seal valve 17 includes a fixed member 52 fixed to the inner side of the wall body of the vacuum chamber 10, a movable member 51 which is advanced so as to be abutted on a peripheral edge portion of the back side of the valve element pressed by the pressing means 18 while being supported by the fixed member 52, and retracted in an evacuating manner from a moving locus of the valve element 17, and driving devices 53, 54, 56 to drive the movable member 51. COPYRIGHT: (C)2006,JPO&NCIPI
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