发明名称 |
Automatic reference position teaching method, automatic positioning method, and automatic carrying method for disk-like object, automatic reference position teaching device, automatic positioning device, and automatic carring device for disk-like object using these methods, and automatic semiconductor manufacturing equipment |
摘要 |
In order to automate the positioning at the steps of reference position teaching and normal manufacturing at respective ports at the start-up of an equipment in a semiconductor manufacturing equipment equipped with a positioning device and a carrying robot and enhance productivity, 2 points W<SUB>1 </SUB>and W<SUB>2 </SUB>at which the circumference of a disc-like object 47 such as a wafer and the locus 43 of a detection means cross are detected, and the center position A of a disc-like object is calculated using the specific point O on the perpendicular bisector 42 of the section of a line combining 2 points with these and the radius r of the disc-like object, in the present invention. Thereby, the carrying robot could carry out the positioning work and not only the correction of a carrying route but also the reference position teaching at the start-up of equipment could be automated using the result. When there is a notched portion, the circumference of a disc-like object is detected by 2 loci of the detection means and a correct center position is detected. Further, a mix manufacturing using wafers with different diameters can be also carried out by detecting the circumferences of dislike objects with an unknown radius by the 3 loci of the detection means and determining the radius.
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申请公布号 |
US2006100740(A1) |
申请公布日期 |
2006.05.11 |
申请号 |
US20050516337 |
申请日期 |
2005.08.05 |
申请人 |
SAKIYA FUMIO;SATO YASUHIGA;NAGAO TETSUYA;IKEDA TOSHIYUKI |
发明人 |
SAKIYA FUMIO;SATO YASUHIGA;NAGAO TETSUYA;IKEDA TOSHIYUKI |
分类号 |
B25J9/16;B25J9/22;G05B19/04;H01L21/67;H01L21/68 |
主分类号 |
B25J9/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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