PATTERN TESTING APPARATUS, PATTERN TESTING METHOD, AND PATTERN TESTING PROGRAM

摘要

A defect test having a possible high precision is achieved by producing, from captured images and design data, reference images in which aging of blur has been reflected. There are included a point spread function estimating part (23) for estimating a point spread function from an observed image and design information; a convolution image generating part (31) for generating a convolution image through a convolution of the point spread function to the design information; a reference image generating part (32) for generating a reference image from the convolution image obtained by the convolution image generating part; and an image comparing part (33) for comparing the observed image with the reference image so as to detect a defect of the pattern.