| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer lamp lighting device capable of irradiation treatment of uniform excimer light when lowering the voltage to be impressed on the excimer lamp by keeping frequencies of high-frequency power to be supplied to the excimer lamp from 1MHz to 1GHz, by shortening the time needed until discharge plasma is uniformly distributed in a whole discharging space. SOLUTION: The excimer lamp lighting device is composed of an excimer lamp 7 having a discharging container, in which discharge gas generating excimer molecules by discharge is filled; a lighting circuit part 20 lighting the excimer lamp 7 with supply of high-frequency electric power of 1MHz to 1GHz; and a control part 10. The control part 10 controls the lighting circuit part 20 so as to supply a power higher than the stationary power supplied at stationary lighting of the excimer lamp 7 during the starting period of the excimer lamp, and supply the stationary power after the excimer lamp is moved into a stationary lighting state. COPYRIGHT: (C)2006,JPO&NCIPI |
