SHEET-SHAPED PROBE, ITS MANUFACTURING METHOD, AND ITS APPLICATION

摘要

PROBLEM TO BE SOLVED: To provide a sheet-shaped probe capable of reliably preventing positional displacements between electrode structures and electrodes to be inspected due to temperature changes and therefore stably maintaining a satisfactory state of electrical connection even when an object to be inspected is a large-area wafer with a diameter of 8 inch or more circuit device having extremely small pitch of electrodes to be inspected and provide its manufacturing method and its applications. SOLUTION: In the sheet-shaped probe, a laminated body in which a resin sheet for an insulating film is integrally overlies a metallic foil for back electrode parts is used. A supporting film in which a plurality of openings are formed is pasted to the other surface of the metallic foil for back electrode parts of the laminated body. A plurality of through holes are formed in the resin sheet for an insulating film correspondingly to the electrode structures to be formed. Short-circuit parts connected to the metallic foil for back electrode parts are each formed in the through holes of the resin sheet for an insulating film by plating, and surface electrode parts connected to them are formed. The metallic foil for back electrode parts is then etched. COPYRIGHT: (C)2006,JPO&NCIPI