| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface roughness/contour measuring instrument moving relatively a probe and a workpiece within an orthogonal XY-plane, by a relatively inexpensive constitution. SOLUTION: The probes 6, 7 of the surface roughness/contour measuring instrument 1 are connected to a driving part 4 for driving the probes 6, 7 along a prescribed one direction, by a connection member 8 moving the probes 6, 7 along the prescribed one direction with respect to the driving part 4. COPYRIGHT: (C)2006,JPO&NCIPI
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