| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystalline silicon microtube comprising crystalline silicon, and its simple manufacturing method not using a template nor a catalyst. SOLUTION: The crystalline silicon microtube is manufactured by disposing a crucible 2 containing silicon monoxide powder 15 in a heating furnace 1, and heating the silicon monoxide powder 15 at a prescribed temperature for a prescribed time while flowing an inert gas 16. A crystalline silicon microtube having several hundredμm length and 2-3μm outer diameter can be manufactured by heating at 1,500-1,750°C for 1-2 hours. This crystalline silicon microtube is expected for applications in semiconductor fields such as light emitting materials, field-emission materials, etc. COPYRIGHT: (C)2006,JPO&NCIPI
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