| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holder capable of reducing a running cost with a configuration using a noncontact type seal. SOLUTION: An annular fixed ring 32 is supported on the upper end of a cover 24 that encloses a motor 11 through a plurality of springs 31. Meanwhile on the lower surface of a lower cover 13 of a spin base 10, an annular rotary ring 34 is arranged to face the fixed ring 32. A gas guiding groove by which a clean gas from a gas supply source is guided, and a dynamic pressure generating groove is continued to the gas guiding groove for generating the dynamic pressure of gas (clean gas) between the fixed ring 32 and the rotary ring 34 when the rotary ring 34 is rotated. Both of the grooves are formed on the lower surface of the rotary ring 34. When the motor 11 is driven and a rotating shaft 9 and the spin base 10 are rotated, the static pressure of the clean gas guided into the gas guiding groove, and the dynamic pressure of the clean air caused by the action of the dynamic pressure generating groove, are generated. COPYRIGHT: (C)2006,JPO&NCIPI |
