MANUFACTURING METHOD OF MAGNETIC HEAD, MAGNETIC HEAD, HEAD GIMBAL ASSEMBLY, HEAD ARM ASSEMBLY, AND HEAD STACK ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To reduce cutting margin in the direction of width of a main magnetic pole when a recording medium opposing plane of the main magnetic pole is formed to a desired inverse trapezoidal shape by enlarging sufficiently difference between a lower part of a main magnetic pole layer and ion milling rate of an upper part. SOLUTION: A low substrate layer 13 is constituted of a non-magnetic material of which the milling rate is faster than a magnetic metal material constituting a main magnetic pole layer 14, an upper substrate layer 15 is constituted of a material of which the milling rate is slower than the magnetic metal material constituting the main magnetic pole layer 14. Ion milling is performed for this lamination structure from a direction making an angle of approximately 40°-70°to a lamination direction. As an upper part of the main magnetic pole layer is affected by an upper substrate layer of which the milling rate is slow, the milling rate is made slower than the other part of the main magnetic pole layer. As a lower part of the main magnetic pole layer is affected by the low substrate layer of which the milling rate is fast, the milling rate is made faster than the other part of the main magnetic pole layer. Consequently, cutting margin in the direction of width of the main magnetic pole can be reduced when a recording medium opposing plane of the main magnetic pole is formed to a desired inverse trapezoidal shape. COPYRIGHT: (C)2006,JPO&NCIPI