| 摘要 |
PROBLEM TO BE SOLVED: To make pressure distribution in a plenum room flat, and to downsize a device. SOLUTION: In the air carrying device, the plenum room 1 provided with a work carrying plate 3 having a large number of air jetting holes 4 on an upper surface thereof is provided. Air led into the plenum room 1 is jetted from these air jetting holes 4, thereby carrying a work W on the carrying surface 3a while floating it. In the plenum room 1, a baffle plate 10 parallel with an air lead-in port2 is arranged at a position separated from the air lead-in port 2 by a predetermined distance. COPYRIGHT: (C)2006,JPO&NCIPI
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