| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel substrate coating system capable of inspecting whether or not a foreign matter exists on a surface of the substrate and continuing action of the whole of the system regardless of existence of the foreign matter. SOLUTION: This substrate coating system has a table member 3 for supporting a flat plate-like substrate 4; a coating means 2 for coating an upper surface of the substrate supported on the table member with a fluid; a foreign matter existence detection means 5, 6 for detecting existence of the foreign matter on the surface of the substrate supported on the table member; and a foreign matter existence detection time treatment means CTR for moving the coating means in a direction leaving from the substrate supported on the table member in response to detection of the existence of the foreign matter. COPYRIGHT: (C)2006,JPO&NCIPI
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