| 摘要 |
PROBLEM TO BE SOLVED: To properly reduce a diameter of a sensor, in the pressure sensor provided with a hollow cylindrical stem having a diaphragm for pressure detection, a sensor chip for detecting deformation of the diaphragm, and a wiring board for connecting the sensor chip electrically to an outside. SOLUTION: In this pressure sensor 100 provided with the hollow cylindrical stem 10 having the diaphragm 11 in one end part of a shaft, and an opening part 12 in the other end part of the shaft, the sensor chip 20 provided on the diaphragm 11, and the wiring board 30 for connecting the sensor chip 20 electrically to the outside, the wiring board 30 is provided in the periphery of the sensor chip 20 on the one end part of the shaft in the stem 10, a circuit chip 40 for processing an electric signal from the sensor chip 20 is provided layeredly on the sensor chip 20, and the circuit chip 40, the sensor chip 20 and the wiring board 30 are respectively connected electrically each other via a bump 50. COPYRIGHT: (C)2006,JPO&NCIPI
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