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发明名称
Reinigungsverfahren zu reinigende Vorrichtung und Reinigungsvorrichtung
摘要
申请公布号
DE69830149(T2)
申请公布日期
2006.04.27
申请号
DE1998630149T
申请日期
1998.11.20
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
KOBAYASHI, YOSHINORI;FUJITAKA, AKIRA
分类号
F25B43/04;F17C13/00;F25B45/00
主分类号
F25B43/04
代理机构
代理人
主权项
地址
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