| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser processing method capable of forming a degeneration layer having width capable of easily dividing an article to be processed by adding external force to the article to be processed, and a laser processing apparatus. <P>SOLUTION: The article to be processed is irradiated with a pulse laser beam, which has transmissivity with respect to the article to be processed, along the dividing scheduled line formed to the article to be processed to form the degeneration layer in the article to be processed along the dividing scheduled line. In this laser processing method, the article to be processed is irradiated with a plurality of pulse laser beams in the width direction of the dividing scheduled line so as to leave a predetermined interval to form a plurality of degeneration layers mutually parallel to the dividing scheduled line. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
