PIEZOELECTRIC BULK RESONATOR AND ITS MANUFACTURING METHOD, FILTER USING PIEZOELECTRIC BULK RESONATOR, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE USING SAME, AND HIGH-FREQUENCY MODULE USING SAME

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric bulk resonator which solves problems of diaphragm structure forming technology and is more small-sized and improved in frequency precision and its manufacturing method, a filter using the piezoelectric bulk resonator, a semiconductor integrated circuit device using the same, and a high-frequency module using the same.

SOLUTION: The piezoelectric bulk resonator of the present invention has: a substrate having a 1st surface and a 2nd surface opposed thereto; a laminated resonator comprising a 1st electrode film coming into contact with the 1st surface, a piezoelectric film superposed on the 1st electrode film, and a 2nd electrode film superposed on the piezoelectric film; and a 1st opening portion opened on the 1st surface and a 2nd opening portion opened on the 2nd surface. A gap portion nearly perpendicular to the 1st surface is opened, and a tapered gap portion is opened nearby the 1st surface.

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