| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method and an apparatus for a transparent electrode substrate, capable of preventing warpage in a base material. SOLUTION: In manufacturing the transparent electrode substrate 10 in which a transparent conductive film 12 is provided on one face 11a of the base material 11 by a spray thermal decomposition method, the base material 11 in which a trench 13 is formed on the other face 11b is used and the transparent conductive film 12 is formed by injecting material solution in a spray form to one face 11a while heating the base material 11 from the other face 11b. COPYRIGHT: (C)2006,JPO&NCIPI
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