发明名称 Diffractive null corrector employing a spatial light modulator
摘要 The present invention is directed to a system and method for using a spatial light modulator (SLM) to perform a null test of an (aspheric) optical surface. In an embodiment, such a system includes an interferometer, an optical element, and an SLM. The interferometer provides electromagnetic radiation. The optical element conditions the electromagnetic radiation to provide a first beam of radiation and a second beam of radiation. The SLM shapes a wavefront of the first beam of radiation resulting in a shaped wavefront corresponding to an optical surface. The shaped wavefront is incident on and conditioned by the optical surface. The shape of the optical surface is analyzed based on a fringe pattern resulting from interference between the shaped wavefront mapped by the optical surface and the second beam of radiation. The system may also include an optical design module that converts a null corrector design corresponding to the optical surface into instructions for the SLM.
申请公布号 US7443514(B2) 申请公布日期 2008.10.28
申请号 US20060540674 申请日期 2006.10.02
申请人 ASML HOLDING N.V. 发明人 HARNED NORA-JEAN;HARNED ROBERT D.
分类号 G01B11/02;G01B9/02 主分类号 G01B11/02
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