发明名称 Method for forming a semiconductor device having a fin and structure thereof
摘要 A method for forming a semiconductor device includes providing a semiconductor layer, forming a passivation layer over the semiconductor layer, wherein the passivation layer has an opening having sidewalls, forming a fin over the semiconductor layer, wherein after forming the passivation layer the fin is within the opening, and forming a portion of a gate within the opening. In one embodiment, a dummy gate is used. In one embodiment, spacers are formed within the opening of the passivation layer. The structure is also discussed.
申请公布号 US7442590(B2) 申请公布日期 2008.10.28
申请号 US20060380530 申请日期 2006.04.27
申请人 FREESCALE SEMICONDUCTOR, INC 发明人 ORLOWSKI MARIUS K.
分类号 H01L21/00;H01L29/80 主分类号 H01L21/00
代理机构 代理人
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