| 摘要 |
The improved vacuum gate of the present invention is capable of airtight isolation or interconnecting between two vacuum chambers. The improved vacuum gate is based on mechanical mechanism which simplifies the whole vacuum gate structure and provides more practical and economical usage. Two reverse L-shaped of the first guiding trenches are used to guide and allow the gate door of the gate box to move both in vertical and horizontal directions in such that the vacuum gate can air seal the vacuum chambers and provide enough force to open and close the vacuum chambers even when the vacuum pressure is increased or when the difference in thrust pressure is increased between the two vacuum chambers. Further, different types of the tubes and bellows can be used in the improved vacuum gate depended on the application of the vacuum gate in the different conditions of the gate valve close-open cycles.
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