发明名称 METHOD OF MANUFACTURING A TRANSISTOR IN SEMICONDUCTOR DEVICE
摘要 <p>A method for fabricating a transistor of a semiconductor device is provided to improve the driving capability of a transistor by guaranteeing more drain current. A first conductive layer(202) is formed on a semiconductor substrate(200). An ion implantation process can be performed to form a well junction(204) in the first conductive layer. An ion implantation process for controlling a threshold voltage can be performed to form a threshold voltage control layer(206) in the well junction. The first conductive layer and the semiconductor substrate are partially etched to form a trench. An isolation layer is formed in the trench to have a step with the first conductive layer. An insulation layer is formed on the first conductive layer and the isolation layer. A second conductive layer(212) is formed on the insulation layer. The second conductive layer and the insulation layer are etched to form a gate(216).</p>
申请公布号 KR20080084167(A) 申请公布日期 2008.09.19
申请号 KR20070025487 申请日期 2007.03.15
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, HYE LYOUNG
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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