发明名称 NOVEL INTEGRATED CIRCUIT SUPPORT STRUCTURES AND THE FABRICATION THEREOF
摘要 Method of fabricating an electronic substrate comprising steps of: (A) selecting first base layer; (B) depositing first etchant resistant barrier layer onto first base layer; (C) building up a first half stack of alternating conductive layers and insulating layers, the conductive layers being interconnected by vias through insulating layers; (D) applying second base layer onto first half stack; (E) applying protective coating of photoresist to second base layer; (F) etching away first base layer; (G) removing protective coating of photoresist; (H) removing first etchant resistant barrier layer; (I) building up second half stack of alternating conductive layers and insulating layers, conductive layers being interconnected by vias through insulating layers, wherein second half stack has lay up substantially symmetrical to first half stack; (J) applying insulating layer onto second half stack, (K) removing second base layer, and (L) exposing ends of vias on outer surfaces of stack and applying terminations thereto.
申请公布号 KR20080084800(A) 申请公布日期 2008.09.19
申请号 KR20087010687 申请日期 2006.10.15
申请人 AMITEC-ADVANCED MULTILAYER INTERCONNECT TECHNOLOGIES LTD. 发明人 HURWITZ DROR;FARKASH MORDECHAI;IGNER EVA;ZEIDLER AMIT;MICHAELI BENNY;STATNIKOV BORIS
分类号 H01L23/48;H01L23/52 主分类号 H01L23/48
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