APPARATUS FOR CLAMPING CATHODE OF ION SOURSE

摘要

An apparatus for clamping a cathode of an ion source is provided to prevent the degradation of clamping force of a cathode fixing shaft and the mis-alignment of a cathode by using a cathode clamp with a clamp screw. An arc chamber(10) has an ionization space. A cathode(20) has a cylindrical shape of which one lateral side is opened at a side of the arc chamber. A cathode fixing shaft(40) is prepared on the other opened side from a cross-sectional center of the cathode. A cathode clamp(50) clamps the cathode fixing shaft at a side of the outside of the cathode by using a clamp screw. A filament(30) is prepared adjacent to a lateral cross-section of the cathode by integrally connecting a pair of leads being inserted into an inner of the cathode. A filament clamp(60) clamps ends of leads of the filament. A spiral line is formed on an outer circumference of the cathode fixing shaft having a part being clamped to the cathode clamp.