发明名称 HEATING MEDIUM SUPPLY DEVICE AND TEMPERATURE CONTROL APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a heating medium supply device which effectively utilizes the heat returned from a temperature control apparatus of a thermostatic device, etc., and achieves the energy saving. SOLUTION: Return side connecting piping 8 has a dual structure, and is formed of a center pipe 75 and an enclosure pipe 76 surrounding the center pipe 75. The enclosure pipe 76 is formed by successively connecting a tee 80, flexible tube 81, and a tee 82. Both ends of the enclosure pipe 76 are blocked. On the other hand, the center pipe 75 is formed by successively connecting a straight pipe 83, a flexible tube 85, and a straight pipe 86. The outer diameter of the center pipe 75 is smaller than the inner diameter of the enclosure pipe 76, and there is a void between them. This void functions as a return side auxiliary passage 77. On the other hand, the center pipe 75 functions as a return side passage. A coolant inlet 87 and a coolant outlet 88 are provided in the side face of the enclosure pipe 76 near both ends thereof respectively. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008159762(A) 申请公布日期 2008.07.10
申请号 JP20060345759 申请日期 2006.12.22
申请人 ESPEC CORP 发明人 NAKANISHI YUUKI;KURAYOSHI HIRONOBU;NISHIKAWA TAHEI
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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