| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a stage device which prevents a relative positional shift between a stage and a board during the scanning of the stage, an exposure apparatus that uses the stage device, and a device manufacturing method that uses the exposure apparatus. <P>SOLUTION: The stage device has vacuum suction clamps 7A and 7B which are disposed at a pair of locations on a movable stage 21 across the barycenter of a reticle 6 on a straight line passing through the barycenter of the reticle 6; and the straight line parallel with the negative/positive directions of a Y direction that are first and second drive directions of the movable stage 6 carrying the reticle 6, and suck and hold the reticle 6. When moving in the first drive direction, the movable stage 21 moves with the vacuum suction clamp 7A in the positive direction of holding the reticle 6, and when moving in the second drive direction, the movable stage 21 moves with the vacuum suction clamp 7B in the negative direction of holding the reticle 6. <P>COPYRIGHT: (C)2008,JPO&INPIT |
