| 摘要 |
<p>Provided is a compact direct drive motor while avoiding atmosphere contamination. A direct drive motor DD includes a stator (29), an atmosphere bearing (33), an internal rotor (30), and resolvers (34a, 34b, 35, 36) as detectors which are arranged in such a manner that they are at least partially superimposed on one another in the axis direction of the direct drive motor DD. This reduces the axis direction length of the direct drive motor DD.</p> |
