发明名称 METHOD FOR BONDING A DIE OR SUBSTRATE TO A CARRIER
摘要 A method is disclosed for bonding two elements by means of a bonding agent such as a glue layer, wherein the bonding agent is removable, and wherein between the bonding agent and at least one element, a sacrificial layer is applied which is selectively removable with respect to that element. According to embodiments, the elements comprise a die or a substrate bonded to a carrier wafer. The nature and type of the die or substrate and of the carrier can vary within the scope of embodiments of the invention. Also disclosed is a composite substrate obtainable by methods of the invention.
申请公布号 US2008166525(A1) 申请公布日期 2008.07.10
申请号 US20070963487 申请日期 2007.12.21
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) 发明人 SWINNEN BART;BEYNE ERIC
分类号 B32B37/26;B05D7/24;B32B7/06;B44C1/22 主分类号 B32B37/26
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