| 摘要 |
<p>Provided is a hydrogen permeable film which is made of a ceramic material composed of a nitride or an oxide of a metal element belonging to the group of IVa or Va or VIa, and hydrogen permeable metal particles of at least one kind selected from among palladium (Pd), niobium (Nb), vanadium (V) and tantalum (Ta) and alloys of such elements dispersed in the ceramic material. The ratio of the hydrogen permeable metal particles in the hydrogen permeable film is 20-70 mass%, and the thickness of the hydrogen permeable film is 5-1,000nm.</p> |
