A method of fabricating an acoustic sensor is provided. The method includes providing at least one photonic crystal structure. An optical waveguide is optically coupled to the at least one photonic crystal structure. A structural portion is mechanically coupled to the at least one photonic crystal structure and to the optical waveguide, wherein a distance between the at least one photonic crystal structure and the end of the optical waveguide is less than about 15 microns.
申请公布号
CA2928100(A1)
申请公布日期
2008.07.09
申请号
CA20082928100
申请日期
2008.01.09
申请人
THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
发明人
KILIC, ONUR;DIGONNET, MICHEL J.F.;KINO, GORDON S.;SOLGAARD, OLAV;MALLICK, SHRESTHA BASU;AKKAYA, ONUR CAN